Ammonia Chemical Microsensor Using ZnO Thin Film and Novel Microheater Design

Exploration of ZnO and ZnMgO/ZnO Thin Film Transistors

ZnO-based transparent thin-film transistors

Highly transparent ZnO-based thin-film transistors ~TFTs! are fabricated with optical transmission ~including substrate! of ;75% in the visible portion of the electromagnetic spectrum. Current– voltage measurements indicate n-channel, enhancement-mode TFT operation with excellent drain current saturation and a drain current on-to-off ratio of ;10. Threshold voltages and channel mobilities of de...

Thin-Film Bulk Acoustic Resonators and Filters Using ZnO and Lead–Zirconium–Titanate Thin Films

This paper presents the findings of a design, modeling, and fabrication study of ZnO and PbZr0 3Ti0 7O3 thin-film bulk acoustic resonators and filters. Measurements of the high-frequency responses of ZnO resonators having different area are used to develop an acoustic model that accurately represents resonator impedance data. The models are also used to interpret -parameter measurements on thin...

Synthesis of Boron-Aluminum Nitride Thin Film by Chemical Vapour Deposition Using Gas Bubbler

Boron included aluminium nitride (B-AlN) thin films were synthesized on silicon (Si) substrates through chemical vapour deposition ( CVD ) at 773 K (500 °C). tert-buthylamine (tBuNH2) solution was used as nitrogen source and delivered through gas bubbler. B-AlN thin films were prepared on Si-100 substrates by varying gas mixture ratio of three precursors. The structural properties of the films ...

Dna Melting Curve Analysis on Semi-transparent Thin Film Microheater on Flexible Lab-on-foil Substrate

This paper presents genotyping on a novel microheater concept using semi-transparent copper microheaters manufactured by roll-to-roll and lift-off on polyethylene napthalate (PEN) foil. Using a mesh structure, heater surfaces have been realized in one single metallization step with a manufacturing robustness higher than conventional meander structures. The thermal distribution of the meshes, ev...